Page 12 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

XI

Appendices

A. List of Abbreviations 445
B. List of Symbols and Prefixes 449

C. List of Some Important Terms 455

D. Fundamental Constants 457

E. Unit Conversion Factors 459
F. Properties of Electronic & MEMS Metallic Materials 461

G. Properties of Electronic & MEMS Semiconducting Materials 463

H. Properties of Electronic & MEMS Ceramic and Polymer
Materials 465

I. Complex Reciprocity Relation and Perturbation Analysis 467

J. Coupled-mode Modeling of a SAW Device 477
K. Suggested Further Reading 481

L. Webography 487

M. List of Worked Examples 491

Index 493