Page 10 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

CONTENTS ix

8.7 Concluding Remarks 300
References 300

9 Introduction to SAW Devices 303
9.1 Introduction 303
9.2 Saw Device Development and History 303
9.3 The Piezoelectric Effect 306
9.3.1 Interdigital Transducers in SAW Devices 307
9.4 Acoustic Waves 308
9.4.1 Rayleigh Surface Acoustic Waves 308
9.4.2 Shear Horizontal Acoustic Waves 311
9.4.3 Love Surface Acoustic Waves 312
9.5 Concluding Remarks 314
References 316

10 Surface Acoustic Waves in Solids 319
10.1 Introduction 319
10.2 Acoustic Wave Propagation 320
10.3 Acoustic Wave Propagation Representation 321
10.4 Introduction to Acoustics 321
10.4.1 Particle Displacement and Strain 321
10.4.2 Stress 323
10.4.3 The Piezoelectric Effect 324
10.5 Acoustic Wave Propagation 325
10.5.1 Uniform Plane Waves in a Piezoelectric Solid: 325
Quasi-Static Approximation
10.5.2 Shear Horizontal or Acoustic Plate Modes 328
10.5.3 Love Modes 330
10.6 Concluding Remarks 334
References 334

11 IDT Microsensor Parameter Measurement 337
11.1 Introduction to IDT SAW Sensor Instrumentation 337
11.2 Acoustic Wave Sensor Instrumentation 337
11.2.1 Introduction 337
11.3 Network Analyser and Vector Voltmeter 338
11.4 Analogue (Amplitude) Measuring System 339
11.5 Phase Measurement System 340
11.6 Frequency Measurement System 341
11.7 Acoustic Wave Sensor Output Frequency Translation 342
11.8 Measurement Setup 343
11.9 Calibration 344
References 345

12 IDT Microsensor Fabrication 347
12.1 Introduction 347
12.2 Saw-IDT Microsensor Fabrication 347