Page 6 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

Contents

Preface xiii

About the Authors xv
Acknowledgments xvii

1 Introduction 1
1.1 Historical Development of Microelectronics 1
1.2 Evolution of Microsensors 2
1.3 Evolution of MEMS 5
1.4 Emergence of Micromachines 7
References 8

2 Electronic Materials and Processing 9
2.1 Introduction 9
2.2 Electronic Materials and their Deposition 9
2.2.1 Oxide Film Formation by Thermal Oxidation 10
2.2.2 Deposition of Silicon Dioxide and Silicon Nitride 11
2.2.3 Polysilicon Film Deposition 15
2.3 Pattern Transfer 15
2.3.1 The Lithographic Process 15
2.3.2 Mask Formation 18
2.3.3 Resist 18
2.3.4 Lift-off Technique 21
2.4 Etching Electronic Materials 22
2.4.1 Wet Chemical Etching 22
2.4.2 Dry Etching 23
2.5 Doping Semiconductors 27
2.5.1 Diffusion 30
2.5.2 Ion Implantation 31
2.6 Concluding Remarks 32
References 34
3 MEMS Materials and their Preparation 35
3.1 Overview 35
3.1.1 Atomic Structure and the Periodic Table 35