Page 5 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

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Library of Congress Cataloguing-in-Publication Data
Gardner, J. W. (Julian W.), 1958-
Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan.
p. cm.
Includes bibliographical references and index.
ISBN 0-471-86109-X
LMicroelectromechanical systems. 2. Detectors. 3.Intelligent control systems. I.
Varadan, V. K., 1943-II. Title.
TK7875 G37 2001
621.381-dc21
2001024353
British Library Cataloguing in Publication Data
A catalogue record for this book is available from the British Library
ISBN 0-471- 86109X
Typeset in 10/12pt Times by Laser Words Private Limited, Chennai, India
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