Page 9 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

viii CONTENTS

7.7 Polymeric MEMS Architecture with Silicon, Metal, and
Ceramics 197
7.7.1 Ceramic MSL 197
7.7.2 Metallic Microstructures 202
7.7.3 Metal-Polymer Microstructures 205
7.7.4 Localised Electrochemical Deposition 206
7.8 Combined Silicon and Polymeric Structures 210
7.8.1 Architecture Combination by Photoforming Process 210
7.8.2 MSL Integrated with Thick Film Lithography 212
7.8.3 AMANDA Process 213
7.9 Applications 216
7.9.1 Microactuators Fabricated by MSL 216
7.9.2 Microconcentrator 218
7.9.3 Microdevices Fabricated by the AMANDA Process 220
7.10 Concluding Remarks 224
References 225

8 Microsensors 227
8.1 Introduction 227
8.2 Thermal Sensors 230
8.2.1 Resistive Temperature Microsensors 231
8.2.2 Microthermocouples 232
8.2.3 Thermodiodes and Thermotransistors 236
8.2.4 SAW Temperature Sensor 239
8.3 Radiation Sensors 240
8.3.1 Photoconductive Devices 241
8.3.2 Photovoltaic Devices 242
8.3.3 Pyroelectric Devices 244
8.3.4 Microantenna 245
8.4 Mechanical Sensors 247
8.4.1 Overview 247
8.4.2 Micromechanical Components and Statics 249
8.4.3 Microshuttles and Dynamics 251
8.4.4 Mechanical Microstructures 254
8.4.5 Pressure Microsensors 257
8.4.6 Microaccelerometers 263
8.4.7 Microgyrometers 266
8.4.8 Flow Microsensors 268
8.5 Magnetic Sensors 270
8.5.1 Magnetogalvanic Microsensors 272
8.5.2 Magnetoresistive Devices 274
8.5.3 Magnetodiodes and Magnetotransistors 275
8.5.4 Acoustic Devices and SQUIDs 277
8.6 Bio(chemical) Sensors 280
8.6.1 Conductimetric Devices 282
8.6.2 Potentiometric Devices 292
8.6.3 Others 296