Page 167 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

SACRIFICIAL LAYER TECHNOLOGY 147

Si substrate Si substrate

(c) (d)

Silicon dioxide

Poly-Si

Figure 6.1 Process flow for a polysilicon cantilever anchored to a silicon substrate by means of
an oxide layer

Anchor definition
/////////////// y/A 1 1/////////,

Si substrate Si substrate

(a) (b) Poly-Si

Silicon dioxide

Si substrate Si substrate

(c) (d)

Figure 6.2 Process flow for a polysilicon cantilever anchored directly to a silicon substrate