Page 172 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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152 SILICON MICROMACHINING: SURFACE
Deposit
and
pattern
sacrificial
layer
(a)
Deposit
and
pattern
(b) polysilicon
Figure 6.7 Process flow for the linear motion actuator shown in Figure 6.6 (Robbins et al. 1991)
two worked examples that are designed to produce rotors with either a centre-pin bearing
or a flange bearing:
Worked Example E6.3: Rotor on a Centre-Pin Bearing 5
Objective:
The objective is to fabricate a disk-shaped rotor made of poly-Si that is free to rotate
about a poly-Si centre bearing.
' For details see Mehregany and Tai (1991).
