Page 246 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

226 MICROSTEREOLITHOGRAPHY FOR MEMS
Katagi, T. and Nakajima, N. (1993). "Photoforming applied to fine machining," Proc. IEEE MEMS,
173–178.
Kathuria, Y. P. (1996). "Rapid prototyping: an innovative technique for microfabrication of metallic
parts," Proc. 7th Int. Symp. Micromachine Hum. Sci., 59–65.
Kodama, H. (1981). "Automatic method for fabricating a three-dimensional plastic model with
photo-hardening polymer," Rev. Sci. Instrum., 52, 1770–1773.
Madden, J. D. and Hunter, J. W. (1996). "Three-dimensional microfabrication by localised electro-
chemical deposition," J. Microelectromech. Syst., 5, 24–32.
Martin, J., Bacher, W., Hagena, O. F. and Schomburg, W. K. (1998). "Strain gauge pressure and
volume-flow transducers made by thermoplastic molding and membrane transfer, "Proc. IEEE
MEMS, 361–366.
Maruo, S. and Kawata, S. (1998). 'Two-photon-absorbed near-infrared photopolymerisation for
three-dimensional microfabrication," J. Microelectromech. Syst., 7, 411–415.
Maruo, S. and Kawata, S. (1997). "Two-photon-absorbed photopolymerisation for three-
dimensional microfabrication," Proc. IEEE MEMS, 169–174.
Monneret, S., Loubere, V. and Corbel, S. (1999). "Microstereolithography using a dynamic mask
generator and noncoherent visible light source," Proc. SPIE, 3680, 553–561.
Nakamoto, T. and Yamaguchi, K. (1996). "Consideration on the producing of high aspect ratio
microparts using UV sensitive photopolymer," Proc. 7th Int. Symp. Micromachine Human Sci.,
53–58.
Polla, D. L. and Francis, L. F. (1996). "Ferroelectric thin films in microelectromechanical systems
applications," MRS Bull., 59–65.
Schomburg, W. K. et al. (1998). "AMANDA-low-cost production of microfluidic devices," Sensors
and Actuators A, 70, 153-158.
Sun, C., Jiang, X. N. and Zhang, X. (1999). "Experimental and numerical study on microstereo-
lithography of ceramics," ASME MEMS, 339–345.
Suzumori, K., Koga, A. and Haneda, R. (1994). "Microfabrication of integrated FMAs using stereo-
lithography," Proc. IEEE MEMS, 136–141.
Takagi, T. and Nakajima, N. (1994). "Architecture combination by micro photoforming process,"
Proc. IEEE MEMS, 211–216.
Taylor, C. S. et al. (1994). "A spatial forming a three-dimensional printing process," Proc. IEEE
MEMS, 203-208.
Thornell, G. and Johansson, S. (1998). "Microprocessing at the fingertips," J. Micromech.
Microeng., 8, 251–262.
Varadan, V. K., Varadan, V. V. and Motojima, S. (1996). "Three-dimensional polymeric and
ceramic MEMS and their applications," Proc. SPIE, 2722, 156–164.
Wayne, R. P. (1988). Principles and Applications of Photochemistry, Oxford University Press, New
York.
Zhang, X., Jiang, X. N. and Sun, C. (1999). "Microstereolithography of polymeric and ceramic
microstructures," Sensors and Actuators A, 77, 149–156.
`Zissi, S. et al. (1996). "Stereolithography and microtechnologies," Microsyst. Technol., 2, 97–102.