Page 248 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

228 MICROSENSORS

Sensor Actuator Processor
Input Output Input Output Input Output

(a) (b) (c)

Figure 8.1 Basic input-output representation of (a) a sensor; (b) an actuator; and (c) a processor
in terms of their energy domains

Sensors Actuators

Figure 8.2 Vectorial representation of (a) a sensor and (b) an actuator in energy domain space.
A processor would be represented by a vector that maps from E and back onto itself

Out Out
E T R Me M C E T R Me M C

E E

T T

R R
In In
Me Me

M M

C

(a) (b)

Figure 8.3 Vectorial representation of a multistage transducer in energy domain space: (a) a
four-stage radiation sensor and (b) a three-stage magnetic actuator