Page 266 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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246 MICROSENSORS
Figure 8.17 Examples of radiation microsensors: (a) CdS photoconductive cell; (b) p-n silicon
pyroelectric IR sensor
photodiode; and (c) LiNbO 3
Antenna
Piezoelectric
IDT Reflector
Figure 8.18 Wireless communication and powering of a SAW-IDT microsensor with an aluminum
microantenna
