Page 273 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

MECHANICAL SENSORS 253

Critically damped

Heavily damped

Load frequency (rads/sec)

Figure 8.23 Dynamic response of an ideal microflexural structure to a sinusoidal driving load

Hammock flexure Anchor to substrate Anchor to substrate
v//////////////. Folded flexure
(angle)

Shuttle
Shuttle mass
y mass

V//////////777A
(b)
Crab-leg flexure Anchor to substrate
V/////////////7,
Shin Ankle'
Hip
-Knee
fThigh Shuttle
mass

Figure 8.24 Three common microflexural designs: (a) hammock; (b) folded; and (c) crab-leg.
Adapted from Gardner (1994)