Page 405 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
P. 405

APPLICATIONS     385

  between  the electric and  acoustic  parameters,  and D matrix  represents  the  acoustic  space
  between  the  IDTs  and  the  reflectors.  The  boundary  conditions  are  applied  assuming that
  there  are  no  incoming  waves  from  outside  the  reflectors  and  output  impedances  are
  matched  at  the  electrical  terminal.  The  frequency response  can  be  computed  from  trans-
  mission  line matrices for appropriate  sections.  The amplitudes of the waves are represented
  by  scalar  electric  potential  3>, which  can  be  written in  terms  of  SAW  velocity  v(x)  as


                                                                      (13 63)
                               .  2     2  ^  I  ^  v                 V  A  — • "-^  /
                              dx     |_u  (x)
  where w is the radiation frequency. The wave velocity v(x)  is perturbed  sinusoidally  about
     while  passing  through  the  metallic  strips  and  can  be  written  as
  V 0
                                        Au
                             v(x)  =  V 0  cos(Ax)                    (13.64)


  where  A  is equal  to 2n/L,  and L  is the period.
     The  solution  of  Equation  (13.63)  gives  a  pair  of  coupled-wave  equations  that  can  be
  represented  as forward and backward  SAW waves with amplitudes  R  and  S.

                                —R—j8R   = jkS                        (13.65)
                                —S—j8S   = jkR                        (13.66)


  The  grating  matrix,  G,  for  an  array  can  be  written  as  shown  in  the  following  equation
  (Campbell  1998). The equation  for this matrix  and that for T  are provided  in Appendix  J
  together  with a list  of  symbols.  We repeat  the  equations  here  for  the  sake  of clarity.


            a     /<$ —  ja \      1
            T  +           tanh(crL)
             k            )        J
     =  C
                                                  <* —  • 7~  ,
                                                   c>
                                                           tanh(crL)
                                                                      (13.67)
  where  k  is  the  coupling  coefficient,  a  is  the  attenuation constant,  L  is  the  period,  B 0  is
  the  unperturbed phase  constant, and

                        .                         k
                         2
                  a = Jk  — (8   —ja)  2  and  C =  -  cosh(<rL)
                       v
                                                  n
  Similarly,  the transmission  matrix  T,  which relates  the electrical and acoustic  parameters
  of  IDTs,  as shown in Figure  13.22,  can  be  obtained  from  the knowledge  of  the  scattering
  matrix  of  an  IDT  (Cross  and  Schmidt  1977).

                                        \t    rl
                                                                      (13.68)
                                     =
                                        U    '33 J
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