Page 400 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
P. 400
380 IDT MICROSENSORS
Antenna Saw
t
Humidity
chamber
Digital hygrometer
Computer
190 • Measured data
— Linear fit
M 180
<u
2-
& 170
140
130
120
30 40 50 60 70 80 90 100
(b) Relative humidity (%RH)
Figure 13.18 (a) Setup for humidity measurement and (b) effect of relative humidity on phase
change
13.4.5 SAW-Based Gyroscope
In general, gyroscopes have a wide range of applications. They are
• Consumer electronics - picture stabilisation in three-dimensional (3D) pointers, cam-
corders, geostationary positioning system (GPS)
• Industrial products - robots, machine control, guided vehicles.
• Medical applications - wheel chairs, surgical tools
• Military applications - smart ammunition, guided missiles and weapon systems (Soder-
kvist 1994; Yazdi et al. 1998)
