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Integrated Pyr oelectric Sensors     145


                       Current response               Voltage response
                   1 μm 2                                          1 μm 2
                   10 μm 2                                         10 μm 2
             10 –6  1000 μm 2                10 0                  1000 μm 2
                   1 mm 2                                          1 mm 2
             10 –8  1 cm 2                  10 –2                  1 cm 2
                                                                   10 cm 2
           Current (A)  10 –10  100 cm 2   Voltage (V)  10 –4      100 cm 2
                   10 cm 2
                                            10 –6
            10 –12
            10 –14                          10 –8
            10 –16                          10 –10
               10 –4  10 –2  10 0  10 2  10 4  10 6  10 –4  10 –2  10 0  10 2  10 4  10 6
                         Frequency (Hz)                 Frequency (Hz)
                            (a)                            (b)
          FIGURE 4.16  The calculated current and voltage response for different sensor
          areas. Substrate: glass 175 μm; pyroelectric layer thickness: 400 nm. Calculated
          for the values of R =  100 MΩ and C = 75 pF. (See also color insert.)
                        i            i

               voltage response also depends on the sensor capacitance connected in
               parallel with the capacitance of the readout electronics. When the sensor
               area is very small, the low capacitance leads to an overall drop of the
               response over the whole frequency regime as in this case the cutoff fre-
               quency is much larger (ω <<  ω ). Bigger sensor elements ( ≥ 1 mm  for
                                                                      2
                                         c
               the sensor configuration in Fig. 4.16), on the other hand, can only increase
               the signal in the low-frequency range (ω <<  ω ), while the response
                                                       c
               remains constant at high frequencies where the linear dependence of
               current and capacitance on the area cancel each other due to

                                      I
                                V   =  pyro  at ω  >> ω             (4.32)
                                 pyro  ω C           c
                   For an explanation of the detailed shape of the calculated results,
               the graphs have to be compared with the temperature lift calculated in
               the pyroelectric layer, given in Fig. 4.17b for a 175 μm thick glass sub-
               strate. In the low-frequency range, the temperature decreases linearly
               with the frequency. In the range from 1 Hz to 10 kHz the slope of the
               temperature lift declines slower than 1/ω and thus produces an enhance-
               ment in the current response. In the high-frequency regime, the tempera-
               ture is not reaching the pyroelectric layer anymore and thus the obtained
               response starts to decrease again. To explain the voltage response, the
               lowpass filter effect of the device connected to the lock-in amplifier has
               to be considered in addition to the temperature effects.

               Comparison of Different Substrates and Their Thicknesses  It is widely
               known in pyroelectric technology that the substrate has a strong
               influence on the pyroelectric response, since it is a heat sink for the
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