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19.9 Integrated Microsensors

Chang Liu

Introduction
The purpose of this section is to provide the general audience in the mechatronics field with information
about micro-integrated sensors. It is my wish that an avid reader interested in the sensors area would be
able to understand common fabrication techniques and sensing principles, and develop rudimentary
background to guide the selection of commercialized sensors and development of custom sensors in the
future.
Contents for this section are organized as follows. First, the general history of microsensors is discussed.
This is followed by a brief discussion about major fabrication methods for microsensors. Commonly
used principles for sensors are reviewed next. Sensing of a physical parameter of interest can be achieved
using various structures and under different sensing principles. Examples of sensors, along with their
structures and fabrication techniques, are provided to familiarize the readers with the configurations and
fabrication methods for each.
The microsensors research area covers diverse disciplines such as materials, microfabrication, elec-
tronics, and mechanics. A comprehensive coverage of all aspects is beyond the scope of this book. We
will focus on a few primary sensing principles and frequently used sensors examples. A reader would be
able to grasp a glimpse of the sensors field from the perspectives of sensing principles and of application
areas. References for further in-depth studies are provided when appropriate.
Definition of Integrated Microsensors
Integrated microsensors refer to sensors or arrays of sensors that are developed using microfabrication
technology. The characteristic length scale of individual microsensors ranges between 1 µm and 1 mm.
Nanosensors refer to sensors with characteristic length scale on the order of 1 nm to 1 mm. In this text,
we are mainly concerned about sensors for detecting physical variables such as force, pressure, tactile
contact, acceleration, rotation, temperature, and acoustic waves. Chemical sensors, used for sensing the
concentration of chemicals or pH values, are beyond the scope of this book.

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