Page 67 - High Power Laser Handbook

38 G a s , C h e m i c a l , a n d F r e e - E l e c t r o n L a s e r s Excimer Lasers 39

With the increasing share of LTPS-based displays and AMOLED
displays, manufacturing is adapting larger glass formats, such as Gen
5.5 (1300 × 1500 mm) for small notebook displays and Gen 8 (2200 ×
2500 mm) for the cost-effective production of large-sized OLED
14
television panels. To meet the takt time requirements, the laser
power is demanded to be greater than 1 kW and the line beam to be
at least 750 mm in length.
Pulsed Laser Deposition
In the pulsed laser application, the excimer lasers high peak power
UV output is used for the ablation of specific materials, which are
then deposited on various other materials to produce unique thin
films with tailored characteristics. In this way, a multitude of thin
films can be deposited, with the advantage that the target material’s
stoichiometric properties are transferred to the substrate. The pro-
15
duction of superhard coatings, or diamond-like carbon (DLC), is
one of the popular examples that has been applied to a wide range
of industries. The emerging high-temperature superconductor
(HTS) industry drives solutions ranging from magnetic energy stor-
age to electrical energy transport grids operating at current densi-
ties 100 times higher than conventional copper-based systems.
Technological advantages of using HTS-based systems, which are
operable with liquid nitrogen cooling, include higher efficiencies,
higher currents, higher power densities, and smaller weight and
size as compared with conventional technologies. Figure 2.21 shows
the amount of copper cable necessary to carry as much current as
the small HTS tape containing a 1-mm-thick superconducting
yttrium barium copper oxide (YBaCuO) layer. The future cost- and
energy-saving potential of HTS are enormous, making these lasers
a first-choice solution for breaking technological barriers. Pivotal to
HTS commercialization are cost-efficient, high-performance thin-
film deposition technologies. 14

Figure 2.21 The thin high-temperature superconductor tape can carry as
much power as the much larger copper wire.