Page 162 - MEMS Mechanical Sensors

6.7 Conclusions 151

[120] Hsieh, W., T.-Y. Hsu, and Y.-C. Tai, “A Micromachined Thin-Film Teflon Electret Micro-
phone,” Proc. Intl. Conf. on Solid State Sensors and Actuators (Transducers ’97), Chicago,
IL, June 16–19, 1997, pp. 425–428.
[121] Kälvesten, E., L. Löfdahl, and G. Stemme, “Small Piezoresistive Silicon Microphones Spe-
cially Designed for the Characterization of Turbulent Gas Flows,” Sensors and Actuators,
Vol. A46–47, 1995, pp. 151–155.
[122] Huang, C., et al., “A Silicon Micromachined Microphone for Fluid Mechanics Research,”
J. Mircomech. Microeng., Vol. 12, 2002, pp. 767–774.
[123] Ko, S. C., et al., “Micromachined Piezoelectric Membrane Acoustic Device,” Sensors and
Actuators, Vol. A103, 2003, pp. 130–134.
[124] Schellin, R., et al., “Micromachined Silicon Subminiature Microphones with Piezoelectric
P(VDF/TrFE) Payers and Silicon Nitride Membranes,” Proc. IEE 8th Int. Symp. on Elec-
trets (ISE 8), Paris, France, September 7–9, 1994, pp. 1004–1009.
[125] Bernstein, J., et al., “Micromachined Ferroelectric Transducers for Acoustic Imaging,”
Proc. Intl. Conf. on Solid State Sensors and Actuators (Transducers ’97), Chicago, IL, June
16–19, 1997, pp. 421–424.
[126] Han, C.-H., and E. S. Kim, “Fabrication of Piezoelectric Acoustic Transducers Built on
Cantilever-Like Diaphragm,” Tech Digest, 14th IEEE Intl. Conf. on MEMS, Interlaken,
Sweden, June 21–25, 2001, pp. 110–113.
[127] Lee, S. S., and R. M. White, “Piezoelectric Cantilever Acoustic Transducer,” J. Micromech.
Microeng., Vol. 8, 1998, pp. 230–238.
[128] Tian-Ling, R., et al., “Design Optimization of Beam-Like Ferroelectric-Silicon Microphone
and Microspeaker,” IEEE Trans. Ultrasonics Ferroelectrics and Frequency Control, Vol.
49, No. 2, February 2002, pp. 266–270.