Page 207 - MEMS Mechanical Sensors

196 Inertial Sensors

Table 8.3 Companies and Their Micromachined Accelerometers
Company Sensor Features Comments
Analog Devices Single axis Analog output; bandwidth dc to 10 kHz; Largest provider of commercial
(http://www.analog.com) (1.5G, 5G, 50G, noise floor from 150 µG/√Hz (1.5G) to 4 accelerometers. They were the first
100G) mG/√Hz (100G); resolution from 1 mG company to integrate a surface
(1.5G) to 40 mG (100G); 5V supply voltage; micromachined sensing element with the
surfacemicromachined sensing element readout and interface electronics on one
chip. (Appr. cost: $10 to $200)
Dual axis 2G, 10G have a duty cycle output
(2G, 10G, 50G)
Applied MEMS Single axis (3G) Analog output; bandwidth dc to 1,500 Hz; dc coupled analog force-feedback
(http://www.appliedmems.com) noise floor 300 nG/√Hz, 6V to 15V supply
voltage; bulk-micromachined sensing
element
Single axis Digital output; bandwidth 1 kHz; noise ASIC with fifth-order sigma delta
(200 mG) floor 30 nG/√Hz modulator
Triaxial Analog output; bandwidth 1,500 Hz; noise
(2.5G and 3G) floor 150 nG/√Hz (3G), 1 µG/√Hz (2.5G);
6V to 15V supply voltage
Colibrys Single axis Ratiometric analog output; bandwidth 800 Custom design devices from 1G to 100G
(http://www.colibrys.com) (2G, 10G) Hz (2G), 600 Hz (10G); output noise floor available
<18 µG/√Hz; resolution <100 µG (2G),
<500 µG (10G); supply voltage 2V to 5V,
bulk-micromachined sensing element
Bosch (http://www.bosch.com) High-G Analog and ratiometric output; bandwidth
sensors, 400 Hz, bulk-micromachined sensing
single and dual element
axis (20G, 35G,
50G, 70G, 100G,
140G, 200G)
Low-G sensors Surface-micromachined sensing element
(0.4G to 3.4G)
Endevco Single-axis Analog output; bandwidth typically from For applications ranging from biodynamics
(http://www.endevco.com) piezoresistive tens of hertz to several kilohertz; sensitivity measurements and flutter testing to high
devices from 1 µV/G (200,000G) to 25 mV/G shock measurements
(from 20G to (20G); supply voltage 10V;
200,000G) bulk-micromachined sensing element
Single-axis Analog output; bandwidth from 15 Hz (2G)
capacitive devices to 1 kHz (50G, 100G); sensitivity from 20
(2G, 10G, 30G, mV/G (100G) to 1 V/G (2G); supply voltage
50G, 100G) 8.5V to 30V; bulk-micromachined sensing
element
Triaxial Analog output; bandwidth from tens of
(from 500G hertz to several kilohertz; sensitivity from
to 2,000G) 0.2 mV/G (2,000G) to 0.8 mV/G (500G);
supply voltage 10V; bulk-micromachined
device
Honeywell Single axis (20G, Analog output; bandwidth 300 Hz; noise Quartz flexure accelerometer for
(http://www. 30G, 60G, 90G) floor 0.6 G/vHz, resolution 1G applications ranging from aerospace, energy
inertialsensor.com) (highest grade 60G device); noise floor 70 exploration, and industrial applications;
nG/vHz, resolution 10G (low grade 30G resonating beam accelerometer
device); supply voltage 13V to 18V; etched
quartz flexure sensing element
Triaxial Frequency output; resolution 1G, Assembly of three single-axis accelerometers
bandwidth 400 Hz to provide three-axis sensing
MEMSIC Dual axis (1G, Analog absolute, analog ratiometric and Integrated MEMS sensors and mixed signal
(http://www.memsic.com) 2G, 5G, 10G) digital output; bandwidth 17 to 160 Hz processing circuitry on single chip using
(depending on device grade); noise floor 0.2 standard CMOS process. Operation is based
to 0.75 mG/√Hz; resolution 2 mG; on heat transfer by convection of air. (Appr.
sensitivity for analog absolute from 500 cost: $12)
mV/G for 1G to 50 mV/G for 10G, for
ratiometric 1,000 mV/G for 1G, 50mV/G
for 10G, for digital 20% duty cycle/G for
1G, 2% duty cycle/G for 10G; supply
voltage 2.7V to 5.25V
Kionix (http://kionix.com) Single and dual Analog output; bandwidth 250 Hz; noise
axis (2G, 5G, floor 60 G/√Hz; resolution 0.1 to 0.3 mG;
10G) sensitivity from 200 mV/G (10G) to 1,000
V/G (2G); supply voltage 5V
Kistler Single axis and Analog output; bandwidth 0 to 300 Hz Accelerometers for low-frequency
(http://kisler.com) triaxial K-Beam (2G), 0 to 180 Hz (10G), 0 to 100 Hz applications. Device assembly provides
range (2G, 10G, (25G); noise floor 38, 200, 570 µG/√Hz; triaxial sensing.
25G) resolution 540 G, 2.8 mG, 8 mG; sensitivity
1 V/G, 200 mV/G, 100 mV/G; supply
voltage 3.8V to 16V, bulk-micromachined
sensing element