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208 Inertial Sensors
[5] Veijola, T., and T. Ryhaenen, “Equivalent Circuit Model of the Squeezed Gas Film in a Sili-
con Accelerometers,” Sensors and Actuators, Vol. A48, 1995, pp. 239–248.
[6] Zhang, L., et al., “Squeeze-Film Damping in Micromechanical Systems,” ASME, Microme-
chanical Systems, DSC-Vol. 40, 1992, pp. 149–160.
[7] Henrion, W., et al., “Wide Dynamic Range Direct Digital Accelerometer,” IEEE Solid-State
Sensor and Actuator Workshop, Hilton Head, SC, 1990, pp. 153–157.
[8] De Coulon, Y., et al., “Design and Test of a Precision Servoaccelerometer with Digital Out-
put,” 7th Intl. Conf. Solid-State Sensors and Actuators (Transducer ’93), Yokohama,
Japan, 1993, pp. 832–835.
[9] Smith, T., et al., “Electro-Mechanical Sigma-Delta Converter for Acceleration Measure-
ments,” IEEE International Solid-State Circuits Conference, San Francisco, CA, 1994, pp.
160–161.
[10] Lu, C., M. Lemkin, and B. Boser, “A Monolithic Surface-Micromachined Accelerometer
with Digital Output,” IEEE J. Solid-State Circuits, Vol. 30, No. 12, 1995, pp. 1367–1373.
[11] Allen, H. V., S. C. Terry, and W. Knutti, “Understanding Silicon Accelerometers,” Sensors,
1989, pp. 1–6.
[12] Barth, P. W., et al., “A Monolithic Silicon Accelerometer with Integral Air Damping and
Overrange Protection,” Tech. Dig. Solid-State Sensors and Actuators Workshop, Hilton
Head, SC, 1988, pp. 35–28.
[13] Pourahmadi, F., L. Christel, and K. Petersen, “Silicon Accelerometer with New Thermal
Self-Test Mechanism,” Tech. Dig. Solid-State Sensors and Actuators Workshop, 1992,
Hilton Head, SC, pp. 122–125.
[14] Allen, H. V., S. C. Terry, and D. W. DeBruin, “Accelerometer Systems with Self-Testable
Features,” Sensors and Actuators, Vol. 20, 1989, pp. 153–161.
[15] Seidel, H., et al., “A Piezoresistive Accelerometer with Monolithically Integrated CMOS-
Circuitry,” Proc. Eurosensors IX and Transducers ’91, Stockholm, Sweden, 1995, pp.
597–600.
[16] Reithmuller, W., et al., “A Smart Accelerometer with On-Chop Electronics Fabricated by a
Commercial CMOS Process,” Sensors and Actuators, Vol. A31, 1992, pp. 121–124.
[17] Kraft, M., C. P. Lewis, and T. G. Hesketh, “Closed Loop Silicon Accelerometers,” IEE Pro-
ceedings—Circuits, Devices and Systems , Vol. 145, No. 5, 1998, pp. 325–331.
[18] Rudolf, F., et al., “Precision Accelerometers with µg Resolution,” Sensors and Actuators,
Vol. A21-23, 1990, pp. 297–302.
[19] Warren, K., “Electrostatically Force-Balanced Silicon Accelerometer,” J. of the Inst. of
Nav., Vol. 38, No. 1, 1991, pp. 91–99.
[20] Gerlach-Meyer, U. E., “Micromachined Capacitive Accelerometer,” Sensors and Actuators,
Vol. A25–27, 1991, pp. 555–558.
[21] Seidel, H., et al., “Capacitive Silicon Accelerometer with Highly Symmetrical Design,” Sen-
sors and Actuators, Vol. A21–23, 1990, pp. 312–315.
[22] McDonald, G. A., “A Review of Low Cost Accelerometers for Vehicle Dynamics,” Sensors
and Actuators, Vol. A21–23, 1990, pp. 303–307.
[23] Analog Devices ADXL50-Monolithic Accelerometer with Signal Conditioning. Datasheet,
Norwood, MA, 1993.
[24] Analog Devices ADXL05-Monolithic Accelerometer with Signal Conditioning. Datasheet,
Norwood, MA, 1993.
[25] Goodenough, F., “Airbags Boom When IC Accelerometer Sees 50G,” Electronic Design,
Vol. 8, 1991, pp. 45–56.
[26] Mukherjee, A., Y. Zhou, and G. K. Fedder, “Automated Optimal Synthesis of Microaccel-
erometers,” Tech. Dig. 12th IEEE Intl. Conf. Micro Electro Mechanical Systems
(MEMS’99), Orlando, FL, 1999, pp. 326–331.
[27] Hierold, C., et al., “A Pure CMOS Surface-Micromachined Integrated Accelerometer,” Sen-
sors and Actuators, Vol. A57, 1996, pp. 111–116.