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For Further Information

A comprehensive review of polysilicon as a material for microelectronics and MEMS is presented in
Polycrystalline Silicon for Integrated Circuits and Displays, 2nd ed., by Ted Kamins. The Materials Research
Society holds an annual symposium on the materials science of MEMS at its fall meetings. The proceed-
ings from these symposia have been published as volumes 546B, 605B and 657B of the Materials Research
Society Symposium Proceedings. Several regularly published journals contain contributed and review
papers concerning materials aspects of MEMS, including: (1) the Journal of Microelectromechanical
Systems, (2) Journal of Micromachining and Microengineering, (3) Sensors and Actuators, and (4) Sensors
and Materials. These journals are carried by most engineering and science libraries and may be accessible
online.

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