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Polymer Microsystems: Materials and Fabrication 9-29

(a)

(b)

(c)

(d)

Sharp edge

(e)

(f)

Gentle edge

(g)

(h)

(i)

(j)

(k)

(l)

(m)

(n)

FIGURE 9.27 Process steps for a parylene membrane (after Fan et al. (2004)).

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