Page 166 - Mechanical design of microresonators _ modeling and applications

0-07-145538-8_CH03_165_08/30/05

Microhinges and Microcantilevers: Lumped-Parameter Modeling and Design

Microhinges and Microcantilevers: Lumped-Parameter Modeling and Design 165

10. M. Zalatudinov, B. Ilic, D. Czaplewski, A. Zehnder, H. G. Craighead, and
J. M. Parpia, Frequency-tunable micromechanical oscillator, Applied
Physics Letters, 77(20), 2000, pp. 2825–2828.
11. C. L. Britton, R. L. Jones, P. I. Oden, Z. Hu, R. J. Warmack, S. F. Smith,
W. L. Bryan, and J. M. Rochelle, Multiple-input microcantilever sensors,
Ultramicroscopy, 82, 2000, pp. 17–21.
12. W. P. King, T. W. Kenny, K. E. Goodson, G. L. Cross, M. Despont, U. T.
Durig, H. Rothuizen, G. Binning, and P. Vettiger, Design of atomic force
microscope cantilevers for combined thermomechanical writing and
thermal reading in array operation, Journal of Microelectromechanical
Systems, 11(6), 2002, pp. 765–774.
13. C. A. Peterson, R. K. Workman, X. Yao, J. P. Hunt, and D. Sarid, V-shaped
metallic-wire cantilevers for combined atomic force microscopy and Fowler-
Nordheim imaging, Nanotechnology, 9, 1998, pp. 331–336.
14. S. Morita, R. Wiesendanger, and E. Meyer, Noncontact Atomic Force
Microscopy, Imperial College Press, London, 1999.
15. W. van de Water, and J. Molenaar, Dynamics of vibrating atomic force
microscopy, Nanotechnology, 11, 2000, pp. 192–199.
16. R. P. Ried, J. Mamin, D. D. Terris, L.-S. Fan, and D. Rugar, 6-MHz 2-N/m
piezoresistive atomic-force microscope cantilevers with INCISIVE tips,
Journal of Microelectromechanical Systems, 6(4), 1997, pp. 294–302.
17. N. Lobontiu and E. Garcia, Two microcantilever designs: modeling for static
deflection and modal analysis, Journal of Microelectromechanical Systems,
13(1), 2004, pp. 41–50.
18. E. Garcia, N. Lobontiu, and Y. Nam, Tuning the static and modal responses
of microcantilevers through lumped-parameter model-based design, 2003
ASME IMECE Congress, Washington, 2003.
19. E. Garcia, N. Lobontiu, Y. Nam, B. Ilic, and T. Reissman, Shape
optimization of microcantilevers for mass variation detection and AFM
applications, SPIE04 International Conference, San Diego, March 2004.

Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
Any use is subject to the Terms of Use as given at the website.