Page 226 - Mechanical design of microresonators _ modeling and applications
P. 226

0-07-145538-8_CH04_225_08/30/05



                                          Microbridges: Lumped-Parameter Modeling and Design

                                               Microbridges: Lumped-Parameter Modeling and Design  225
                                                        p = w + g                       (4.183)

                              (For a circular cross-section microbridge, d should be employed instead
                              of w.) In the end, the number of stations becomes

                                                       c 2   1     1
                                                 n =            í  2 )                  (4.184)
                                                     w + g( 2     l max
                                                           l
                                                            min
                              for rectangular cross-section microbridges of widths w. For cylindrical
                              wires, w is simply replaced by d in Eq. (4.184). The constant c is
                                                              4  E
                                                     c =1.014t  ȡ                       (4.185)

                              for rectangular cross-section members and

                                                               4  E
                                                     c =0.943d   ȡ                      (4.186)

                              for circular cross-section (wire) members.


                              References

                              1. B. Ilic, H. G. Craighead, S. Krylov, W. Senaratne, C. Ober, and P. Neuzil,
                                 Attogram  detection  using  nanoelectromechanical  devices,  Journal of
                                 Applied Physics, 95(7), 2004, pp. 3694–3703.
                              2. L. Sekaric, J. M. Parpia, H. G. Craighead, T. Feygelson, B. H. Houston, and
                                 J.  E.  Butler,  Nanomechanical  resonant  structures  in  nanocrystalline
                                 diamond, Applied Physics Letters, 81(23), 2002, pp. 4455–4456.
                              3. L. Sekaric, M. Zalatudinov, R. B. Bhiladvala, A. T. Zehnder, J. M. Parpia,
                                 and H. G. Craighead, Operation of nanomechanical resonant structures in
                                 air, Applied Physics Letters, 81(14), 2002, pp. 2641–2643.
                              4. S. Evoy, A. Olkhovets, L. Sekaric, J. M. Parpia, H. G. Craighead, and D. W.
                                 Carr, Time-dependent  internal  friction  in  silicon  nanoelectromechanical
                                 systems, Applied Physics Letters, 77(15), 2000, pp. 2397–2399.
                              5. A. Husain, J. Home, H. W. C. Postma, X. M. H. Huang, T. Drake, M. Barbic,
                                 A.  Scherer,  and  M.  L.  Roukes,  Nanowire-based  very-high-frequency
                                 electromechanical  resonators,  Applied Physics Letters, 83(6),  2003,  pp.
                                 1240–1242.
                              6. R.  R.  A.  Syms,  Electrothermal  frequency  tuning  of  folded  and  coupled
                                 vibrating micromechanical resonators, Journal of Microelectromechanical
                                 Systems, 7(2), 1998, pp. 164–171.
                              7. I. Dufour and L. Fadel, Resonant microcantilever type chemical sensors:
                                 Analytical modeling in view of optimization, Sensors & Actuators B, 91,
                                 2003, pp. 353–361.



                           Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
                                      Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
                                        Any use is subject to the Terms of Use as given at the website.
   221   222   223   224   225   226   227   228   229   230   231