Page 228 - Mechanical design of microresonators _ modeling and applications

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Source: Mechanical Design of Microresonators

Chapter
5

Resonant Micromechanical

Systems

5.1 Introduction
Building upon the material presented thus far in the book, this chapter
presents micromechanical resonators that are fabricated by integrating
compliant parts with rigid and massive ones. Beam-type and spring-
type resonators are first studied by using various modeling and design
approaches which enable description of these mechanical resonators
at different complexity levels. The main forms of actuation and sensing
(transduction) that are currently implemented in micromechanical res-
onators are further analyzed, including electrostatic, electromagnetic,
piezoelectric, piezomagnetic, and bimorph-based procedures. Real-life
examples of microgyroscopes, tuning forks, and resonant sensors with
the basic modeling apparatus and solved examples complete this
chapter.

5.2 Beam-Type Microresonators
Several mechanical microresonators are studied in this section com-
prising flexible, beam-type members, which can deform by either bend-
ing or torsion. Three models are developed which are based on various
levels of approximation with respect to stiffness and inertia properties
and which yield the main resonant frequencies. The simplest resonant
systems are single-degree-of-freedom, but multiple-degree-of-freedom
(multiple-DOF) systems are also discussed. This study analyzes

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