Page 227 - Mechanical design of microresonators _ modeling and applications

0-07-145538-8_CH04_226_08/30/05

Microbridges: Lumped-Parameter Modeling and Design

226 Chapter Four

8. F. Ayela and T. Fournier, An experimental study of anharmonic micro-
machined silicon resonators, Measurement Science Technology, 9, 1998, pp.
1821—1830.
9. F. Plotz, S. Michaelis, R. Aigner, H.-J. Timme, J. Binder, and R. Noe, A low-
voltage torsional actuator for application in RF-microswitches, Sensors &
Actuators A, 92, 2001, pp. 312—317.
10. Z. J. Yao, S. Chen, S. Eshelman, D. Denniston, and C. L. Goldsmith,
Micromachined low-loss microwave switches, Journal of Micro-
electromechanical Systems, 8, , 1998, pp. 269—271.
11. D. Peroulis, S. Pacheco, and L. P. B. Katehi, MEMS devices for high
isolation switching and tunable filtering, IEEE MMT-S International
Microwave Symposium Digest, 2000, pp. 1217—1220.
12. J. Y. Park, G. H. Kim, K. W. Chung, and J. U. Bu, Monolithically integrated
micromachined RF MEMS capacitive switches, Sensors and Actuators A,
89, 2001, pp. 88—94.
13. G. M. Rebeiz, RF MEMS: Theory, Design, and Technology, Wiley
Interscience, Hoboken, N. J., 2003.
14. M. Madou, Fundamentals of Microfabrication, 2d ed., CRC Press, Boca
Raton, Fla., 2002.
15. S. Timoshenko, Vibration Problems in Engineering, D. Van Nostrand
Company, New York, 1928.
16. S. S. Rao, Mechanical Vibrations, 2d ed., Addison-Wesley, Reading, Mass.,
1990.
17. N. Lobontiu, Compliant Mechanisms: Design of Flexure Hinges, CRC Press,
Boca Raton, Fla., 2002.
18. N. Lobontiu and E. Garcia, Mechanics of Microelectromechanical Systems,
Kluwer Academic Press, New York, 2004.

Downloaded from Digital Engineering Library @ McGraw-Hill (www.digitalengineeringlibrary.com)
Copyright © 2004 The McGraw-Hill Companies. All rights reserved.
Any use is subject to the Terms of Use as given at the website.