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Design at Resonance of Mechanical Microsystems
42 Chapter One
References
1. S. Timoshenko, Vibration Problems in Engineering, D. Van Nostrand
Company, New York, 1928.
2. W. T. Thomson, Theory of Vibration with Applications, 2d ed., Prentice-
Hall, Englewood Cliffs, NJ, 1981.
3. S. S. Rao, Mechanical Vibrations, 2d ed., Addison-Wesley, New York,
1990.
4. K. Ogata, System Dynamics, 4th ed., Prentice-Hall, New York, 2004.
5. J. B. Starr, Squeeze-film damping in solid-state accelerometers, Technical
Digest, IEEE Solid State Sensor and Actuator Workshop, 1990, pp. 44–47.
6. M. Andrews, I. Harris, and G. Turner, A comparison of squeeze-film
theory with measurements on a microstructure, Sensors & Actuators,
36, 1993, pp. 79–87.
7. T. Veijola, H. Kuisma, and J. Lahdenpera, Model for gas film damping in
a silicon accelerometer, International Conference on Solid-State Sensors
and Actuators, 4, 1997, pp. 1097–1100.
8. J. J. Blech, On isothermal squeeze films, Journal of Lubrication
Technology, 105, 1983, pp. 615–620.
9. W. C. Tang, T.-C. Nguyen, and R.T. Howe, Laterally-driven polysilicon
resonant structures, Proceedings of IEEE Micro Electro Mechanical
Systems Conference, Oiso, Japan, 1989, pp. 53–59.
10. Y.-H. Cho, A. P. Pisano, and R. T. Howe, Viscous damping model for
laterally oscillating microstructures, Journal of Microelectro-mechanical
Systems, 3(2), 1994, pp. 81–87.
11. X. Zhang, and W. C. Tang, Viscous air damping in laterally-driven
microresonators, Sensor and Actuators, 20(1-2), 1989, pp. 25–32.
12. N. Yazdi, F. Ayazi, and K. Najafi, Micromachined inertial sensors,
Proceedings of the IEEE, 86(8), 1998, pp. 1640–1659.
13. T. W. Roszhart, The effect of thermoelastic internal friction on the Q of
micromachined silicon resonators, Technical Digest on Solid-State Sensor
and Actuator Workshop, 1990, pp. 13–16.
14. R. Lifshitz, and M. L. Roukes, Thermoelastic damping in micro- and
nanomechanical systems, Physical Review B, 61(8), 2000, pp. 5600–5609.
15. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny,
B. C. Stipe, and D. Rugar, Quality factors in micron- and submicron-thick
cantilevers, Journal of Microelectromechanical Systems, 9(1), 2000,
pp. 117–125.
16. H. Hosaka, K. Itao, and S. Kuroda, Damping characteristics of beam-
shaped micro-oscillators, Sensors and Actuators A, 49, 1995, pp. 87–95.
17. D. A. Czaplewski, J. P. Sullivan, T. A. Friedmann, D. W. Carr, B. E. N.
Keeler, and J. R. Wendt, Mechanical dissipation in tetrahedral
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