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                                            Design at Resonance of Mechanical Microsystems

                                                   Design at Resonance of Mechanical Microsystems  43
                                  amorphous carbon,  Journal of Applied Physics,   97(2), 2005,
                                  pp. 023517-1–023517-10.
                              18.  A. M. Freudenthal,  Introduction to the Mechanics of  Solids, Wiley,
                                  New York, 1966.
                              19.  A. N. Cleland, and M. L. Rourkes, Noise processes in nanomechanical
                                  resonators, Journal of Applied Physics, 92(5), 2002, pp. 2758–2769.
                              20.  R. Mazet, Mécanique Vibratoire, Dunod, Paris, 1966.
                              21.  L. Lin, R. T. Howe, and A. P. Pisano, Microelectromechanical filters for
                                  signal processing, Journal of Microelectromechanical Systems, 7(3), 1998,
                                  pp. 286–294.






















































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