Page 143 - Mechanics of Microelectromechanical Systems

130 Chapter 2
(all segments have the same thickness). By also knowing E = 150 GPa,
calculate the central transverse force, which will produce a maximum
deflection of

Answer:

Problem 2.14
A microbridge is formed of three constant rectangular cross-section
members, of which the end ones are identical, The microbridge is acted upon
by a central torque Knowing
and G = 60 GPa, determine the maximum
angular deformation of the microbridge.

Answer:

Problem 2.15
A microbridge is formed of three constant rectangular cross-section
segments (the end ones being identical) with Find the proper ratio
which will maximize the mid-point deflection under the action of a
distributed load acting on the middle segment. (Hint: Plot

Answer:
The ratio c needs to be maximum.

References

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3. D. Lange, H. Baltes, O. Brand, Cantilever-based CMOS Nano-Electro-Mechanical Systems,
Berlin, Springer-Verlag, 2002.
4. M. Gad-El-Hak, The MEMS Handbook, CRC Press, Boca Raton, 2001.
5. J.A. Pelesko, D.H. Bernstein, Modeling MEMS and NEMS, CRC Press, Boca Raton, 2002.
6. M.J. Madou, Fundamentals of Microfabrication: the Science of Miniaturization, Second
Edition, CRC Press, Boca Raton, 2002.
7. N. Lobontiu, Compliant Mechanisms: Design of Flexure Hinges, CRC Press, Boca Raton,
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8. N. Lobontiu, E. Garcia, Two microcantilever designs: lumped-parameter model for static
and modal analysis, Journal of Microelectromechanical Systems, 13(1), 2004, pp. 41-50.
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