Page 43 - Mechanics of Microelectromechanical Systems
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30 Chapter 1
where is the strain energy stored in the component of Fig. 1.18 under the
action of The strain energy produced in axial loading can be expressed
from Eq. (1.71) in the form:
The equilibrium equation in terms of axial loading is:
The solution to the differential Eq. (1.101) is a second degree polynomial,
which can be expressed as:
By applying the boundary conditions:
the distribution function is found to be:
The tip axial force can be determined by using Eqs. (1.99) through
(1.104) as:
where the axial stiffness is:
