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Ch29-I044963.fm Page 144 Tuesday, August 1, 2006 3:05 PM
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144 Page 144 Tuesday, August 1, 2006 3:05 PM

9
8 8
7 7 X
) The 1st time
( 8 V 6 6 -»- The 1st time
e
The 2nd time
g 5 5 -m- The 2nd time
a | n 4
The 3rd time
e 1 h c 4 /A The 3rd time
The 4th time
g 3 The 4th time
o I a t l 2 2 >
>• V 1 1
0
100
50
200
150
0 0 50 100 150 200 250
250
Weight(g)
Weight(g)
Figure 9: The voltage change when pressurized using weight.
CONCLUSINS
A micromachined force sensing element having a pillar and a diaphragm is proposed and fabricated. It
can detect three components of the force in x, y and z direction by using four piezoresistors located
four edges of the diaphragm. The performance of force detection in z direction is experimentally
characterized. The relationship between the input weight and the resistance change has good linearity
within the range from 0 to 200 gf.
ACKNOWLEDGEMENT
This work was mainly supported by MEXT (Ministry of Education, Culture, Sports, Science and
Technology).KAKENHI (17656090). This work was also partially supported by JSPS (Japan Society
for the Promotion of Science).KAKENHI (16310103), "High-Tech Research Center" Project for
Private Universities: Matching Fund Subsidy from MEXT, 2000-2004 and 2005-2009, the Kansai
University Special Research Fund, 2004 and 2005.

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