Page 314 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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294    MICROSENSORS


























































   Figure  8.61  PolFET vapour sensor: (a) basic structure, (b) array of four polymer-coated n-channel
   MOSFETs,  (c) typical  dynamic  response  to  pulses  of  ethanol  vapour  in  air,  and  (d)  isotherms  of
   two  polymers  for ethanol  and toluene. From  Covington  et al.  (2000)


   a  conducting  polymer  FET  (polFET)  gas  sensor  and  its response  (c) to pulses  of  ethanol
   vapour  in  air  (Covington  et al.  2000).
     The  poly(pyrrole)/butane  sulfonic  acid  (BSA)  PolFET  has  a  voltage  sensitivity  of
   0.8  uV/PPM  to  ethanol  and  the  poly(bithiophene)/TBATFB  PolFET  has  a  sensitivity
  of-0.7  uV/PPM  to  toluene  -  its  behavior  is  well  described  by the  Langmuir  isotherm.
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