Page 97 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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78 STANDARD MICROELECTRONIC TECHNOLOGIES
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Figure 4.12 Formation of an isolation region (p ) in the substrate to separate devices electrically
in a bipolar process. The isolation regions are used to enhance packing densities
Figure 4.13 A vertical n-p-n transistor and lateral p-n-p transistor formed by a standard bipolar
process
