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Adaptive Optofluidic Devices     193


               membrane’s torsion in some areas, while increasing it in the others.
               Angular rotation of the grating by up to 8 degrees was demonstrated
               at applied pressure of approximately 2 psi (see Fig. 8-6c).



          8-3 Summary
               In this chapter we reviewed a number of tunable optofluidic
               devices. In these devices gases and liquids are used to manipu-
               late and control light in its many forms: planar-guided and free-
               space,  coherent, and broadband. These devices comprise two
               major parts—the microfluidic device used as an actuator and the
               optical element that performs the optical tuning function. We pro-
               vided a detailed review of adaptive and tunable optical elements
               such as lenses, gratings, scanners, and beam shapers. Integration
               of these elements with their actuation devices and other optical
               components allows construction of miniature multifunctional
               optical devices enabling further integration into micro- and mac-
               roscale systems.
                  Additionally, optofluidic switches use liquids and thus can
               operate with ultrawide spectral bandwidth and simultaneously be
               invariant to the state of polarization of optical beams; these proper-
               ties cannot be achieved with other technologies. N × 1 optical switch-
               ing based on optofluidic components is made possible and allows
               significant simplification of N × N optical switching and interconnec-
               tions. Both total internal reflection and diffraction phenomena were
               exploited to construct optofluidic switches.
                  Pneumatically driven compound lens overcomes pitfalls of tradi-
               tional liquid-filled tunable lenses.  Absence of liquid allows faster
               operation and improved performance, which is not compromised by
               bubbles under mechanical stresses and vibrations. Moreover, aper-
               tures much larger than in liquid-filled lenses are readily available.
               These lenses were shown to produce considerable refractive power
               under comparatively low applied pressures.
                  Composite membrane technology presented in this chapter is
               based on soft polymer membranes patterned with rigid epoxy
               inclusions. These inclusions are designed to obtain the desired
               mechanical properties of the membrane and allow good control of
               the deformation profile. As the fabrication relies on planar litho-
               graphic techniques, the pattern can be easily produced in high vol-
               umes with high accuracy. Although composite membranes were
               so far exploited for tunable gratings [119], they show much poten-
               tial for any adaptive and tunable optics where arbitrary geometry
               is desired.
                  In this early stage of development of optofluidics as a field of
               research, every new device opens new perspectives and stimulates
               research showing improved performance and new applications. The
               significant progress of micro- and nanofabrication techniques is striving
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