Page 157 - Wire Bonding in Microelectronics
P. 157

Gold-Aluminum Intermetallic Compounds       135


              temperature (in Kelvins). ∗  The value of K changes for each intermetal-
              lic phase, and is also dependent upon the neighboring phases, which
              supply additional Au and Al for continued compound formation.
                 Because of this, Philofsky lists nine different rate constants for the
              five Au-Al compounds. Figure 5-2 shows the relative rates of inter-
              metallic formation. From this, it is apparent that Au Al  grows much
                                                         5  2
              faster than the other phases. (Because of this, it is also the phase most
              often cited as resulting in Kirkendall voiding and bond failures.)
                 The mechanical properties of the five compounds differ among
              themselves and vary widely from those of the Au and Al. The crystal-
              lographic lattice constants are larger (see Table 5-1), so they occupy a
              larger volume, and thus, plagued bonds often appear to be lifted up.
              The thermal expansion coefficients are considerably lower for the
              compounds than for either Au or Al, and some reliability implica-
              tions for both of these differences are discussed in Noolu’s App. 5B
              of this chapter. Temperature cycling can be used to reveal potential
                    †
              failures  resulting from these property differences [5-7].
                 The compounds are also much harder (and more brittle), so, plagued
              bonds can crack during temperature cycling or other stresses. Some
              detailed properties of these Au-Al compounds are given in Table 5-1.
                 The rate of diffusion of one metal into the other (or into itself) is
              dependent on the number of defects in the crystal lattice. Defects can
              be vacancies, dislocations, and grain boundaries. During diffusion,
              one atom moves into an empty lattice position (vacancy), and another
              atom moves into the empty position of the first. Grain boundaries
              and surfaces, because the lattice has more open structures, have many
              vacancies and they increase the diffusion rate by orders of magnitude
              compared to diffusion in the bulk or a single crystal. Poorly welded
              bonds consist of numerous isolated microwelds which contain large
              surface area-to-volume ratios, as well as mechanical stresses that
              result in numerous lattice defects. Thick-film metallizations also con-
              tain many grain boundaries, stresses, and impurities, all of which
              result in lattice defects. Thus, it is not surprising that poorly welded
              bonds or Al-wire bonds to thick films fail rapidly, see App. 5A for a
              discussion on this problem.
                 A generic activation energy, E (one that combines the effects of all
              five compounds and/or Kirkendall voids), for various bond failures
              is often measured by workers. As a result, the literature abounds with
              different values of (E) for various properties thought to be related to

              ∗ In chemical or metallurgical literature, one often sees the equation written as:
              K = C exp (−Q /RT), where Q is the activation energy in kilocalories/mole (1 eV ≈
              23 K). Cal/mole), R is the gas constant (1.98), and T = temperature in Kelvins.
              † lntermetallic problems were revealed in plastic encapsulated devices in several
              hundred temperature cycles from −40 to 140°C (1% cumulative failures occurred
              at 300 cycles, and 2% at 800). Four times as many cycles were required for 0 to
              125°C testing.
   152   153   154   155   156   157   158   159   160   161   162