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Summary                                                                       215

                   [9] Yao, J. J., S. Park, and J. DeNatale, “High Tuning-Ratio MEMS-Based Tunable Capacitors
                       for RF Communications Applications,” Technical Digest of Solid-State Sensor and Actua-
                       tor Workshop, Hilton Head, NC, June 1998, pp. 124–127.
                  [10] Yao, J. J., et al., “A Low Power/Low Voltage Electrostatic Actuator for RF MEMS Applica-
                       tions,” Technical Digest of Solid-State Sensor and Actuator Workshop, Hilton Head, NC,
                       June 2000, pp. 246–249.
                  [11] Yao, J. J., “RF MEMS from a Device Perspective,” Journal of Micromechanics and Micro-
                       engineering, Vol. 10, 2000, pp. R9–R38.
                  [12] Ulrich, R., and L. Schaper, “Putting Passives in Their Place,” IEEE Spectrum, Vol. 40,
                       No. 7, July 2003, pp. 26–30.
                  [13] Van Schuylenbergh, K., et al., “Low-Noise Monolithic Oscillator with an Integrated
                       Three-Dimensional Inductor,” Technical Digest of International Solid-State Circuits Con-
                       ference, San Francisco, CA, February 2003, pp. 392–393.
                  [14] Chua, C. L., et al., “Out-Of-Plane High-Q Inductors On Low-Resistance Silicon,” Journal
                       of Microelectromechanical Systems, Vol. 12, No. 6, December 2003, pp. 989–995.
                  [15] Tang, W. C., T. -C. H. Nguyen, and R. T. Howe, “Laterally Driven Polysilicon Resonant
                       Microdevices,” Sensors and Actuators, Vol. 20, 1989, pp. 25–32.
                  [16] Nguyen, C. T. -C., and R. T. Howe, “CMOS Micromechanical Resonator Oscillator,”
                       Technical Digest of International Electron Devices Meeting, Washington, D.C., December
                       1993, pp. 199–202.
                  [17] Nguyen, C. T. -C., “Frequency-Selective MEMS for Miniaturized Communications
                       Devices,” Proceedings of 1998 IEEE Aerospace Conference, Vol. 1, Snowmass, CO,
                       March 1998, pp. 445–460.
                  [18] Wang, K., and C. T. -C. Nguyen, “High-Order Micromechanical Electronic Filters,” Tech-
                       nical Digest of IEEE 1997 International Micro Electro Mechanical System Workshop,
                       Nagoya, Japan, January 26–30, 1997, pp. 25–30.
                  [19] Nguyen, C. T. -C., and R. T. Howe, “Quality Factor Control for Micromechanical Reso-
                       nantors,” Technical Digest of International Electron Devices Meeting, San Francisco, CA,
                       December 1992, pp. 505–508.
                  [20] McMillan, J. A., et al., “High Frequency Single Crystal Silicon Resonant Devices,” Pro-
                       ceedings of the 38th Annual Symposium and Topical Conference of the American Vacuum
                       Society, 1991.
                  [21] Bannon, F. D., J. R. Clark, and C. T. -C. Nguyen, “High-Q HF Microelectromechanical Fil-
                       ters,” IEEE Journal of Solid-State Circuits, Vol. 35, No. 4, April 2000, pp. 512–526.
                  [22] Wang, K., A. -C. Wong, and C. T. -C. Nguyen, “VHF Free-Free Beam High-Q Microme-
                       chanical Resonators,” Journal of Microelectromechanical Systems, Vol. 9, No. 3, Septem-
                       ber 2000, pp. 347–360.
                  [23] Hsu, W. -T., and C. T. -C. Nguyen, “Stiffness-Compensated Temperature-Insensitive
                       Micromechanical Resonators,” Technical Digest of 15th IEEE Conference on Micro Elec-
                       tro Mechanical Systems, Las Vegas, NV, January 2002, pp. 731–734.
                  [24] Nguyen, C. T. -C., “Frequency-Selective MEMS for Miniaturized Communications
                       Devices,” Proc. 1998 IEEE Aerospace Conference, Vol. 1, Snowmass, CO, March 21–28,
                       1998, pp. 445–460.
                  [25] Larson III, J. D., et al., “A BAW Antenna for the 1900 MHz PCS Band,” Proc. 1999 Ultra-
                       sonics Symposium, pp. 887–890.
                  [26] “Agilent ACPF-7001 High Rejection Tx Filter for US PCS Band Data Sheet,” Agilent Tech-
                       nologies, Inc., Palo Alto, CA, March 30, 2003.
                  [27] U. S. Patent 6,060,818, May 9, 2000.
                  [28] Ruby, R. C., et al., “Thin Film Bulk Wave Acoustic Resonators (FBAR) for Wireless Appli-
                       cations,” Proc. 2001 IEEE Ultrasonics Symposium, pp. 813–821.
                  [29] U. S. Patent 6,215,375, April 10, 2001.
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