Page 533 - Cam Design Handbook

THB15 9/19/03 8:03 PM Page 521

CAMS IN MICROELECTROMECHANICAL SYSTEMS 521

(a)

(b)
FIGURE 15.12. (a). Schematic of the angular microvibromotor. (b) Scanning electron microscope picture
of a prototype (courtesy of Abraham P. Lee, National Institute of Standards and Technology).

electrostatic comb drives. This and other actuators used in MEMS are discussed in the
next section.

15.7 ACTUATORS FOR MICRO CAMS

As seen in the previous examples, both linear and rotary microactuators are available to
drive microcams and other micromechanical elements. Although a very large number of
actuators using a variety of transduction principles are available, only electrostatic linear