Page 189 - System on Package_ Miniaturization of the Entire System
P. 189

Inductance (nH)  Q @ GHz SRF (GHz)  Set 2  Set 1  Set 2  Set 1  Set 2  Set 1  122 @ 3.6 126 @ 3.68  9.52  9.57  2.74  2.74  74 @ 2.33 75 @ 2.52  6.91  6.99  2.92  2.97  119 @ 2.18 122 @ 2.19  6.57  6.57  4.32  4.32  67 @ 2.01 69 @ 2.12  4.88  4.93  4.72  4.74  65 @ 1.5 58 @ 1.7  3.81  3.82  9.33  9.05  65 @ 1.05 65 @ 1.38  2.55  2.56




                                  Metal  Layer  M1  M3  M1  M3  M1  M1





                                  Size  (mils)  54 × 30  54 × 30  75 × 51  75 × 51  45 × 45  60 × 61 Summary of Embedded Inductor Results


                                  No. of   Turns  1  1  1  1  2  3.5




                                    Inductor  A  B  C  D  E  F  TABLE 4.2










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