Page 34 - Sami Franssila Introduction to Microfabrication
P. 34

Introduction 13



                                          High-efficiency filters




















                                                         Production
                                                         equipment



                                                                         Air extract
                                                 (a)


                                                 High-efficiency
                                                    air filter

















                                                         Production
                                                         equipment



                                                                         Air extract
                                                 (b)
           Figure 1.12 Two cleanroom designs: (a) laminar airflow in the whole room with 100% filter coverage and (b) laminar
           flow above process equipment only. Source: Cleanroom Design, 2nd edition, W. Whyte, 1999,  John Wiley &
           Sons, Limited
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