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[30] Chen, X., and A. Lal, “Integrated Pressure and Flow Sensor in Silicon-Based Ultrasonic Sur-
gical Actuator,” Proc. IEEE Ultrasonics Symposium, 2001, pp. 1373–1376.
[31] Kang, J., et al., “Comfort Sensing System for Indoor Environment,” Proc. Transducers, Chi-
cago, IL, 1997, pp. 311–314.
[32] Koo, J., and C. Kleinstreuer, “Liquid Flow in Microchannels: Experimental Observations
and Computational Analyses of Microfluidics Effects,” Journal of Micromechanics and
Microengineering, Vol. 13, 2003, pp. 568–579.
[33] White, F. M., Fluid Mechanics, New York: McGraw-Hill, 1979.
[34] Shames, I. H., Mechanics of Fluids, New York: McGraw-Hill, 1992.
[35] Tabeling, P., “Some Basic Problems of Microfluidics,” Proc. 14th Australasian Fluid
Mechanics Conference, Adelaide, Australia, 2001.
[36] Ghosh, S., A. K. Sood, and N. Kumar, “Carbon Nanotube Flow Sensor,” Science Express
Reports, Vol. 299, 2003, pp. 1042–1044.
[37] Yang, J., and D. Y. Kwok, “Analytical Treatment of Flow in Infinitely Extended Circular
Microchannels and the Effect of Slippage to Increase Flow Efficiency,” Journal of Microme-
chanics and Microengineering, Vol. 13, 2003, pp. 115–123.
[38] Matsumoto, H., and J. E. Colgate, “Preliminary Investigation of Micropumping Based on
Electrical Control of Interfacial Tension,” Proc. Micro Electro Mechanical Systems
(MEMS), Napa Valley, CA, 1993, pp. 105–110.
[39] Zengerle, R., et al., “Carbon Dioxide Priming of Micro Liquid Systems,” Proc. Micro Elec-
tro Mechanical Systems (MEMS), Amsterdam, the Netherlands, 1995, pp. 340–343.
[40] Konzelmann, U., H. Hecht, and M. Lembke, “Breakthrough in Reverse Flow Detection—A
New Mass Air Flow Meter Using Micro Silicon Technology,” SAE Technical Paper Series
950433, International Congress and Exposition, Detroit, MI, 1995, pp. 105–111.
[41] Ashauer, M., et al., “Thermal Flow Sensor for Liquids and Gases Based on Combinations of
Two Principles,” Sensors and Actuators, Vol. A73, 1999, pp. 7–13.
[42] Bedö, G., H. Fannasch, and R. Müller, “A Silicon Flow Sensor for Gases and Liquids Using
AC Measurements,” Sensors and Actuators, Vol. A85, 2000, pp. 124–132.
[43] Lammerink, T. S. J., et al., “Micro-Liquid Flow Sensor,” Sensors and Actuators, Vol.
A37–38, 1993, pp. 45–50.
[44] Wu, S., et al., “MEMS Flow Sensors for Nano-Fluid Applications,” Proc. International
Conference on Micro Electro Mechanical Systems (MEMS), Miyazaki, Japan, 2000, pp.
745–750.
[45] Wu, S., et al., “MEMS Flow Sensors for Nano-Fluid Applications,” Sensors and Actuators,
Vol. A89, 2001, pp. 152–158.
[46] Sundeen, J. E., and R. C. Buchanan, “Thermal Sensor Properties of Cermet Resistor Films
on Silicon Substrates,” Sensors and Actuators, Vol. 90, 2001, pp. 118–124.
[47] Ernst, H., A. Jachimowicz, and G. A. Urban, “High Resolution Flow Characterization in
Bio-MEMS,” Sensors and Actuators, Vol. A100, 2002, pp. 54–62.
[48] Kohl, F., et al., “A Micromachined Flow Sensor for Liquid and Gaseous Fluids,” Sensors
and Actuators, Vol. A41–42, 1994, pp. 293–299.
[49] Lyons, C., et al., “A High-Speed Mass Flow Sensor with Heated Silicon Carbide Bridges,”
Proc. International Conference on Micro Electro Mechanical Systems (MEMS), Heidelberg,
Germany, 1998, pp. 356–360.
[50] Glaninger A., et al., “Wide Range Semiconductor Flow Sensors,” Sensors and Actuators,
Vol. A85, 2000, pp. 139–146.
[51] Bracio, B. R., et al., “A Smart Thin-Film Flow Sensor for Biomedical Application,” Proc.
Annual EMBS International Conference, Chicago, IL, 2000, pp. 2800–2801.