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                  [52] Kaltsas, G., and A. G. Nassiopoulou, “Novel C-MOS Compatible Monolithic Silicon Gas
                       Flow Sensor with Porous Silicon Thermal Isolation,” Sensors and Actuators, Vol. A76,
                       1999, pp. 133–138.
                  [53] Oda, S., et al., “A Silicon Micromachined Flow Sensor Using Thermopiles for Heat Trans-
                       fer Measurement,” Proc. IEEE Instrumentation and Measurement Technology Confer-
                       ence, Anchorage, AK, 2002, pp. 1285–1289.
                  [54] Häberli, A., et al., “IC Microsensors—Between System and Technology,” Proc. IEEE-CAS
                       Region 8 Workshop on Analog and Mixed IC Design, Baveno, Italy, 1997, pp. 36–40.
                  [55] Stemme, G., “A Monolithic Gas Flow Sensor with Polyimide as Thermal Insulator,” IEEE
                       Trans. on Electron Devices, Vol. 33, No. 10, 1986, pp. 1470–1474.
                  [56] Rodrigues, R. J., and R. Furlan, “Design of Microsensor for Gases and Liquids Flow Meas-
                       urement,” Microelectronics Journal, Vol. 34, 2003, pp. 709–711.
                  [57] Gardeniers, J. G. E., H. A. C. Tilmans, and C. C. G. Visser, “LPCVD Silicon-Rich Silicon
                       Nitride Films for Applications in Micromechanics, Studied with Statistical Experimental
                       Design,” Journal of Vacuum Science Technology, Vol. A14, No. 5, 1996, pp. 2879–2892.
                  [58] Elwenspoek, M., and R. Wiegerink, Mechanical Microsensors, Berlin: Springer-Verlag,
                       2001.
                  [59] Rasmussen, A., et al., “Simulation and Optimization of a Microfluidic Flow Sensor,” Sen-
                       sors and Actuators, Vol. A88, 2001, pp. 121–132.
                  [60] Damean, N., P. P. L. Regtien, and M. Elwenspoek, “Heat Transfer in a MEMS for Micro-
                       fluidics,” Sensors and Actuators, Vol. 105, 2003, pp. 137–149.
                  [61] http://www.hsg-imit.de.
                  [62] http://www.sensirion.com.
                  [63] Lammerink, T. S. J., et al., “A New Class of Thermal Flow Sensors Using ∆T=0 as a Control
                       Signal,” Proc. International Conference on Micro Electro Mechanical Systems (MEMS),
                       Miyazaki, Japan, 2000, pp. 525–530.
                  [64] Ebefors, T., E. Kälvesten, and G. Stemme, “Three Dimensional Silicon Triple-Hot-Wire
                       Anemometer Based on Polyimide Joints,” Proc. International Conference on Micro Electro
                       Mechanical Systems (MEMS), Heidelberg, Germany, 1998, pp. 93–98.
                  [65] Chen, J., J. Zou, and C. Liu, “A Surface Micromachined, Out-of-Plane Anemometer,”
                       Proc. International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas,
                       NV, 2002, pp. 332–335.
                  [66] Chen, J., et al., “Two-Dimensional Micromachined Flow Sensor Array for Fluid Mechanics
                       Studies,” Journal of Aerospace Engineering, Vol. 16, No. 2, 2003, pp. 85–97.
                  [67] Dittmann, D., et al., “Low-Cost Flow Transducer Fabricated with the AMANDA-
                       Process,” Proc. Transducers, Munich, Germany, 2001, pp. 1472–1475.
                  [68] de Bree, H.-E., et al., “Bi-Directional Fast Flow Sensor with a Large Dynamic Range,” Jour-
                       nal of Micromechanics and Microengineering, Vol. 9, 1999, pp. 186–189.
                  [69] van Oudheusden, B. W., and J. H. Huijsing, “An Electronic Wind Meter Based on a Silicon
                       Flow Sensor,” Sensors and Actuators, Vol. A22, 1990, pp. 420–424.
                  [70] van Oudheusden, B. W., and A. W. van Herwaarden, “High-Sensivity 2-D Flow Sensor
                       with an Etched Thermal Isolation Structure,” Sensors and Actuators, Vol. 22, 1990, pp.
                       425–430.
                  [71] van Oudheusden, B. W., “Silicon Thermal Flow Sensor with a Two-Dimensional Direction
                       Sensitivity,” Measurement Science and Technology, Vol. 1, 1990, pp. 565–575.
                  [72] Durst, F., A. Al-Salaymeh, and J. Jovanovic, “Theoretical and Experimental Investigations
                       of a Wide-Range Thermal Velocity Sensor,” Measurement Science and Technology, Vol.
                       12, 2001, pp. 223–237.
                  [73] http://www.bosch.com.
                  [74] http://www.hl-planar.com.
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