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                                          Microbridges: Lumped-Parameter Modeling and Design

                              186   Chapter Four
                              This transform  is mainly useful when  we  are carrying out  stiffness
                              calculations for microbridges which are formed of a single geometric
                              curve (profile) and which possess a transverse symmetry axis.
                                The subscript  f is used here to denote  the  full-length microhinge
                              whereas for the half portion between points 2 and 3 in Fig. 4.14, no
                              additional subscript notation is utilized. The following equations can be
                              written in terms of bending compliances:

                                                                              2
                                                        /
                                             l  2      l 2  2     l   2      l C
                                      C l, f œ  x dx  =  œ  x dx  +  œ  x dx  =  r  +2C l
                                           =
                                                                   /
                                             0  EI y   0   EI y   l 2 EI y     2
                                             l        l 2        l                       (4.64)
                                                       /
                                        c, f œ  xdx   œ  xdx    œ   xdx
                                      C    =       =          +          = lC r
                                                                 /
                                             0  EI y  0   EI y   l 2 EI y
                                             2C c
                                      C r, f  =  l
                              Equations (4.64) have been derived by applying the two  compliance
                              transforms of Chap. 3. By solving the first two of Eqs. (4.64), the two
                              compliances that correspond to one-half the microhinge of Fig. 4.14 are
                              determined to be

                                                  2C l, f  í lC c, f  C c, f
                                             C =                 C =                     (4.65)
                                              l                    r
                                                       4                l
                              It can also be shown that the torsional compliance of the segment 2-3
                              can be expressed in terms of the compliance of the full-length micro-
                              hinge as

                                                            C t, f
                                                       C =                               (4.66)
                                                         t   2

                              4.4.2  Generic formulation for single-profile
                              (basic shape) microbridges
                              As was the case with constant-cross-section microbridges, only a half-
                              model of a variable-cross-section microbridge  is  analyzed, provided
                              there is transverse symmetry of the design, which means that one-half
                              of the microbridge is mirrored-identical to the other half. Figure 3.7,
                              which was used for symmetric microcantilevers, is also valid for this
                              derivation, and the generic half-bridge model of Fig. 4.4 is as well. The
                              assumption is made with this model that the microbridge width is




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