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                                            Design at Resonance of Mechanical Microsystems

                                                   Design at Resonance of Mechanical Microsystems  35

                                      x                   q
                                 Mechanical amount  m     R      Electrical amount
                                                          L
                                      c

                                      k

                                                          e
                                      f                  1/C
                              Figure 1.32 Force-voltage (mass-inductance) analogy.



                                       iL        iR       iC

                              i         L        R        C        e




                              Figure 1.33 Parallel LRC electric circuit.

                              and therefore Eq. (1.119) can be written as
                                                   2
                                                  d q      dq   1
                                               L      + R     +   q = e                 (1.121)
                                                  dt 2     dt   C
                              It can be seen that Eq. (1.118), describing the forced motion of the me-
                              chanical system sketched in Fig. 1.30, and Eq. (1.121), defining the time
                              behavior of the electric circuit shown in Fig. 1.31, are both second-order
                              differential equations with constant coefficients, and therefore the two
                              systems are analogous. Figure 1.32 illustrates the direct relationships
                              between the amounts defining the two systems.
                                The other analogy that can be drawn between a mechanical and an
                              electrical system is also based on the single-degree-of-freedom system
                              of Fig. 1.30 and the electrical system sketched in Fig. 1.33.
                                Kirchhoff’s first (or node) law shows that the source current i is the
                              sum of currents passing through the inductor, resistor, and capacitor:
                                                    i = i + i + i                       (1.122)
                                                        L   R   C
                              By taking into account the current definitions

                                               1
                                                             e
                                          i =  Lœ Cdt   i =  R  i = C  de               (1.123)
                                                                 C
                                                        R
                                           L
                                                                       dt

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