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2. Microcantilevers, microhinges, microbridges 109
Figure 2.29 Geometry and loading for a folded microcantilever. (a) beam model; (b)
simplified parallel/series model; (c) simplified equivalent series model
This last configuration was studied in the previous sub-section, and the out-
of-the-plane, bending-related compliances are:
Compared to the original equations of a two-member serial microcantilever –
Eqs. (2.139), (2.140) and (2.141) –, all compliances of the root member 2 in
