Page 123 - Mechanics of Microelectromechanical Systems
P. 123

110                                                         Chapter 2
         Fig.  2.29 (c)  are  divided by  2  because in  actuality  there are two  such
         segments –  see  Fig.  2.29 (b)  –  which are  connected in  parallel, and, as
         demonstrated for  hollow  rectangular  microcantilevers, the resulting
         compliances of  the  equivalent  member are  half the  ones of  a  single
         component member.


         Example 2.14
             Compare the linear bending stiffness of a folded microcantilever having
         constant  rectangular  cross-section compliant  members with    to  the
         linear bending  stiffness of a similar  folded microcantilever  where
         Consider the two designs have lengths that are correspondingly identical.

         Solution:
             For constant  rectangular  cross-section compliant  members, the  generic
         Eqs. (2.154), (2.155) and (2.156) reduce to:














         The stiffness  matrix can  be  obtained by  inverting the corresponding
          compliance  matrix, as  has  been  previously  explained in Eq. (2.135).  The
         generic stiffness      is  located  in  the first row  and  first  column of the
          generic stiffness matrix, and its equation is:

























                               Figure 2.30  Ratio  of  stiffnesses
   118   119   120   121   122   123   124   125   126   127   128