Page 123 - Mechanics of Microelectromechanical Systems
P. 123
110 Chapter 2
Fig. 2.29 (c) are divided by 2 because in actuality there are two such
segments – see Fig. 2.29 (b) – which are connected in parallel, and, as
demonstrated for hollow rectangular microcantilevers, the resulting
compliances of the equivalent member are half the ones of a single
component member.
Example 2.14
Compare the linear bending stiffness of a folded microcantilever having
constant rectangular cross-section compliant members with to the
linear bending stiffness of a similar folded microcantilever where
Consider the two designs have lengths that are correspondingly identical.
Solution:
For constant rectangular cross-section compliant members, the generic
Eqs. (2.154), (2.155) and (2.156) reduce to:
The stiffness matrix can be obtained by inverting the corresponding
compliance matrix, as has been previously explained in Eq. (2.135). The
generic stiffness is located in the first row and first column of the
generic stiffness matrix, and its equation is:
Figure 2.30 Ratio of stiffnesses