Page 120 - Mechanics of Microelectromechanical Systems
P. 120
2. Microcantilevers, microhinges, microbridges 107
The overall axial stiffness is:
an the overall torsion stiffness is:
Example 2.13
Determine the mass that attaches to the microcantilever sketched in Fig.
2.26 (a), assuming that the deposition takes place at the free end on the
longitudinal (symmetry) axis. The tip slope is 0.02° and known are also
the following material and geometry parameters: E = 140 GPA,
Solution:
The free end slope can be expressed in this case as:
where is calculated by means of Eq. (2.140). The component
compliances are calculated as:
Because the gravity force is equal to mass times gravitational acceleration,
Eq. (2.149) gives the unknown mass as:
