Page 205 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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SCANNING METHOD 185
Figure 7.14 Some 3-D polymeric microparts made by an IH process: (a) bending pipe of 100 urn
by 100 um cross section and length 1000 um; (b) 3-D connected pipes with an inner diameter of
30 um; and (c) microcoil spring of diameter 50 urn and height 250 um
Figure 7.15 A polymer mould (a) used to make a metal micropillar of dimensions 60 um by
60 urn by 100 um (b) in an IH process. From Ikuta and Hirowatari (1993)
