Page 211 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
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TWO-PHOTON MSL 191
Figure 7.25 Various microstructures fabricated by the two-photon absorption MSL (from Maruo
and Kawata (1998)) (a) SEM image of a spiral structure and (b) its magnified view. SEM images
of microtubes made of solidified resin (c) length 55.6 urn; (d) inside diameter 1.8 urn and thickness
0.62 urn; (e) microspiral tube of external diameter 4 um and length 74.3 um; (f) external diameter
4 um. SEM image of microfunnels made of solidified polymer of length 63 um (g) entire part;
(h) top part; and (i) bottom view