Page 211 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
P. 211

TWO-PHOTON MSL      191
































































 Figure  7.25  Various microstructures  fabricated  by the two-photon  absorption  MSL  (from  Maruo
 and  Kawata  (1998))  (a)  SEM  image of  a  spiral  structure  and  (b)  its  magnified  view.  SEM  images
 of microtubes  made  of solidified resin  (c) length  55.6  urn; (d) inside diameter  1.8 urn and  thickness
 0.62  urn; (e)  microspiral  tube  of external  diameter  4  um  and  length  74.3  um;  (f) external  diameter
 4  um.  SEM  image  of  microfunnels  made  of  solidified  polymer  of  length  63  um  (g)  entire  part;
 (h)  top  part;  and  (i)  bottom  view
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