Page 411 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
P. 411

APPLICATIONS    391


























  Figure  13.26  Computed displacement  of a particle  at the  middle of  the resonator  at  the resonant
  frequency





                                                  t  Port 2
                                               V 2




                  Port 1




                                   ©    Electrical
                                    o
                   o.                    •out


                  Acoustic                         Acoustic
                               lllllHl

               SAW                                      SAW




  Figure  13.27  (a) Two-wire  transmission  line  and  its  equivalent  circuit  representation  and
  (b) schematic  representation  of the  electrical  and  acoustic ports
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