Page 411 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim
P. 411
APPLICATIONS 391
Figure 13.26 Computed displacement of a particle at the middle of the resonator at the resonant
frequency
t Port 2
V 2
Port 1
© Electrical
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Acoustic Acoustic
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SAW SAW
Figure 13.27 (a) Two-wire transmission line and its equivalent circuit representation and
(b) schematic representation of the electrical and acoustic ports