Page 416 - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim

396 IDT MICROSENSORS

Eddy, D. S. and Soarks, D. R. (1998). "Application of MEMS technology in automotive sensors
and actuators," Proc. IEEE, 86, 1747-1755.
Gere, J. M. and Timoshenko, S. P. (1990). Mechanics of Materials, PWS-Kent, Kent, UK.
Hauden, D., Jaillet, G. and Coquerel, R. (1981). Temperature sensor using SAW delay line, Proc.
IEEE Ultrasonic Symp., Chicago, IL, USA, pp. 148–151.
Haus, H. and Wright, P. V. (1980). "The analyses of grating structures by coupling-of-modes
theory," IEEE Ultrasonics Symp., 1, 277–281.
Hollinger, R. D. et al. (1999). "Wireless surface acoustic wave-based humidity sensor," Proc. SPIE,
3876, pp. 54-62.
Hoummady, M., Campitelli, A. and Wlodarski, W. (1997). "Acoustic wave sensors: design, sensing
mechanisms and applications," Smart Materials Struct., 6, 647-657.
Kurosawa, M., Fukuda, Y., Takasaki, M. and Higuchi, T. (1998). "A surface-acoustic wave gyro-
scope sensor," Sensors and Actuators A, 66, 33–39.
Lao, B. Y. (1980). "Gyroscopic effect in surface acoustic waves," IEEE Ultrasonics Symp., 2,
687-690.
Pierce, J. R. (1954). "Coupling-of-modes of propagation," J. Appl. Phys., 25, 179-183.
Reeder, T. M. and Cullen, D. E. (1976). "Surface acoustic wave pressure and temperature sensors,"
Proc. IEEE, 64(5), 754–756.
Slobodnik, A. J. (1976). "Surface acoustic waves and SAW materials," Proc. IEEE, 64, 581–595.
Soderkvist, J. (1994). "Micromachined gyroscopes," Sensors and Actuators A, 43, 65–71.
Staples, E. J. (1974). "UHF surface acoustic wave resonators," Proc. IEEE Ultrasonics Symp., 1,
245-252.
Subramanian, H., Varadan, V. K., Varadan, V. V. and Vellekoop, M. J. (1997). "Design and fabrica-
tion of wireless remotely readable MEMS based microaccelerometers," Smart Materials Struct.,
6, 730-738.
Suh, W. D. et al. (2000). "Design optimisation and experimental verification of wireless IDT based
micro temperature sensor," Smart Materials Struct., 9, 890-897.
Varadan, V. K. et al. (2000a). "Conformal MEMS-IDT gyroscopes and their performance compar-
ison with fiber optic gyroscope," Proc. SPIE Smart Electronics MEMS, 3990, 335-344.
Varadan, V. K. et al. (2000b). "Design and development of a MEMS-IDT gyroscope," J. Smart
Materials Struct., 9, 898–905.
Varadan, V. V. et al. (1997). "Wireless passive IDT strain microsensor," Smart Materials Struct.,
6, 745-751.
Vlassov, Y. N. A., Kozlov, S., Pashchin, N. S. and Yakovkin, I. B. (1993). "Precision SAW pres-
sure sensors," IEEE Int. Frequency Control Symp., p. 635.
White, R. M. (1985). "Surface acoustic wave sensors," Proc. IEEE Ultrasonics Symp., 1, 490-494.
White, R. M. and Voltmer, F. W. (1965). "Direct piezoelectric coupling to surface acoustic waves,"
Appl. Phys. Lett., 7, 314-316.
Yazdi, N., Ayazi, F. and Najafi, K. (1998). "Micromachined inertial sensors," Proc. IEEE, 86,
1640-1658.