Page 289 - Semiconductor For Micro- and Nanotechnology An Introduction For Engineers
P. 289

Interacting Subsystems
                             persion surface. Thus this rather simple idealization of the crystal surface
                             qualitatively reproduces the features of surface phonons, namely
                             • Exponential amplitude decay into the depth of the crystal, and
                             • A range of allowed phonon frequencies terminated by the optical and
                               acoustical branches of the dispersion diagram.

                Surface      We now consider what happens when an acoustic wave in a solid travels
                Acoustic     close to the surface in the long wavelength limit. Recall that the wave
                Waves (SAW)
                             equation for a 3D solid is

                                                    2
                                                   ∂ u
                                                 ρ-------- =  ∇• σ               (7.110)
                                                     2
                                                   ∂t
                             which, together with the elastic constitutive equation for a crystal with
                             cubic symmetry and the strain-displacement relation

                                                   σ =  C:ε                     (7.111a)
                                                  1          T
                                              ε =  --- ∇u +(  ( ∇u) )           (7.111b)
                                                  2
                             results in the wave equations for the displacement field

                                                    2
                                                   ∂ u 1
                                                  ρ---------- =
                                                      2
                                                    ∂t
                                                                                (7.112a)
                                 2                 2       2          2     2
                                ∂ u 1             ∂ u 2  ∂ u       ∂ u 1  ∂ u 
                                                            3
                                                                              1
                                             44 
                             C ---------- +  ( C 12  +  C ) ----------------- +  ----------------- +  C  ---------- +  ----------
                                                                   44
                               11
                                                                        2
                                   2
                                                                              2
                                 ∂x              ∂x ∂x 2  ∂x ∂x 3    ∂x  ∂x 
                                                   1
                                                           1
                                   1                                    2     3
                                                    2
                                                   ∂ u 2
                                                  ρ---------- =
                                                      2
                                                    ∂t
                                                                                (7.112b)
                                 2                 2       2          2     2
                                ∂ u 2            ∂ u    ∂ u        ∂ u  ∂ u 
                                                            3
                                                                        2
                                                                              2
                                                    1
                             C ---------- +  ( C  +  C ) ----------------- +  ----------------- +  C  ---------- +  ----------
                                             44 
                              11   2    12                         44   2     2
                                ∂x 2            ∂x ∂x 1  ∂x ∂x 3    ∂x 1  ∂x 
                                                   2
                                                           2
                                                                              3
                286          Semiconductors for Micro and Nanosystem Technology
   284   285   286   287   288   289   290   291   292   293   294